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Photolithographic Techniques for LSI & VLSI

Writing the patterns of the Electronics of a digital computer on a minute silicon crystal of 0.2 square inch area.. This thin minute crystal slice (chip) contains 512,000 transistors other resistor capacitor components. Writing the pattern is just the start subsequent processing involves several other steps.



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Keywords: Optical Lithography, Proximity Pringing, Contact Printing, Projection Printing, Electron Beam Lithography-ray Lithography.,IJSER

ISSN: 22295518

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