The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002–2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.
| YEAR | Impact Factor |
|---|---|
| 2023-24 | 1.5 |
| 2022 | 2.0 |
| 2021 | 1.167 |
Journal of Micro-Nanopatterning Materials and Metrology-JM3, 1932-5134, 2007-ongoing, Engineering,Materials Science,Physics and Astronomy.